Zeiss Auriga Cross Beam
The Auriga combines a high resolution SEM to the precision milling and nanofabrication abilities of a high resolution FIB.
The SEM features Schottky field emission Gemini electron column operating between 100V and 30kV, capable of resolutions of 1.0nm at 15kV and 1.9nm at 1kV. The SEM column is coupled with Ga+ ion FIB. The FIB column operates between 1kV and 30kV with a range of ion beam currents between 1pA and 20nA. It also has the capability of imaging to 2.5nm resolution.
High resolution images are obtained with a standard in chamber ET detector, and two in column detectors, in the form of an in lens SE detector and also an energy selective backscattered electron detector.
A Zeiss gas injection system is fitted, which enables the deposition of Platinum.to protect the sample surface during Ion Milling.
The Auriga at Imperial College London is also equipped with the SIMS detector which enables the FIB positive and negative secondary ions for mass spectra of surface composition, concentration depth profiling and surface composition
Current activities on the Auriga
- Cross-sectional imaging through samples and EDS micro analysis.
- High resolution EBSD
- Slice and view
- In-situ nano deformation
Micropillar compression test on two-phase Ti6246, showing slip of and load-displacement-time on the prismatic plane. Test was performed using a nanoindenter (Alemnis)
EBSD map of Zircaloy-4 compressed to 8.5% strain along the rolling direction. The IPF colouring shows the orientation of the grains with respect to the plate rolling direction. The red lenticular grains are tensile (T1) twins; the c-axis of the twins are rotated 85 degrees away from the parent grain