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BibTex format

@inproceedings{Cotter:2013:11/117006,
author = {Cotter, JP and Zeimpekis, I and Kraft, M and Hinds, EA},
doi = {11/117006},
publisher = {IOP PUBLISHING LTD},
title = {Improved surface quality of anisotropically etched silicon (111) planes for mm-scale optics},
url = {http://dx.doi.org/10.1088/0960-1317/23/11/117006},
year = {2013}
}

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TY  - CPAPER
AU  - Cotter,JP
AU  - Zeimpekis,I
AU  - Kraft,M
AU  - Hinds,EA
DO  - 11/117006
PB  - IOP PUBLISHING LTD
PY  - 2013///
SN  - 0960-1317
TI  - Improved surface quality of anisotropically etched silicon {111} planes for mm-scale optics
UR  - http://dx.doi.org/10.1088/0960-1317/23/11/117006
UR  - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000326344500045&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
ER  -

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