Publications
372 results found
Syms RRA, 2002, Scaling laws for MEMS mirror-rotation optical cross connect switches, JOURNAL OF LIGHTWAVE TECHNOLOGY, Vol: 20, Pages: 1084-1094, ISSN: 0733-8724
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- Citations: 50
Syms RRA, 2002, Long-travel electrothermally driven resonant cantilever microactuators, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Vol: 12, Pages: 211-218, ISSN: 0960-1317
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- Citations: 25
Lowe D, Syms RRA, Huang WB, 2002, Layout optimization for erbium-doped waveguide amplifiers, JOURNAL OF LIGHTWAVE TECHNOLOGY, Vol: 20, Pages: 454-462, ISSN: 0733-8724
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- Citations: 11
Boyle P, Syms RRA, Moore DF, 2002, Packaging solutions for MEMS/MOEMS using thin films as mechanical components, Bellingham, Conference on design, test, integration, and packaging of MEMS/MOEMS 2002, Cannes, France, 6 - 8 May 2002, Publisher: Spie-Int Society Optical Engineering, Pages: 496-507
Boyle P, Moore DF, Syms RRA, 2002, Micropackaging using thin films as mechanical components, New York, 52nd electronic components and technology conference (ECTC), San Diego, California, 2002, Publisher: IEEE, Pages: 801-807
Ahmad MM, Michelutti L, Syms RRA, 2002, Microengineered quadrupole mass spectrometer, NPL workshop on oMEMS for metrologyo NPL teddington, Middlesex, UK, 18 November 2002
Syms RRA, Lohmann A, 2002, Tuning mechanism for a MEMS external cavity laser, New York, IEEE/LEOS International Conference on Optical MEMS, Lugano, Switzerland, 20 - 23 August 2002, Publisher: IEEE, Pages: 183-184
Syms RRA, 2002, Compact design for MEMS cross-connect switches, New York, IEEE/LEOS International Conference on Optical MEMS, Lugano, Switzerland, 20 - 23 August 2002, Publisher: IEEE, Pages: 117-118
Syms RRA, 2002, Optical MEMS in single crystal silicon, Semiconductor 2002, Edinburgh, 24 - 25 June 2002
Syms RRA, Roberts DA, 2002, Moving waveguide scanners based on long-travel electrothermal cantilever micro-actuators (Invited paper), IOPa conference on MOEMS, 31 October 2002
Laliotis A, Yeatman EM, Syms RRA, et al., 2002, Compact planar waveguide amplifiers using sol-gel glass on silicon, 1st internatioanl conference on photonic access technologies, IEE, Savoy Place, London, UK, 17 - 18 December 2002, Pages: 4/1-4/5
Syms RR, Moore DF, 2002, Optical MEMS for telecoms, Materials Today, Vol: 5, Pages: 26-35, ISSN: 1369-7021
Syms RRA, 2001, Measurement of starting torque in surface tension self-assembly of microstructures, ELECTRONICS LETTERS, Vol: 37, Pages: 859-861, ISSN: 0013-5194
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- Citations: 5
Syms RRA, Gormley C, Blackstone S, 2001, Improving yield, accuracy and complexity in surface tension self-assembled MOEMS, SENSORS AND ACTUATORS A-PHYSICAL, Vol: 88, Pages: 273-283, ISSN: 0924-4247
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- Citations: 39
Taylor S, Tindall RF, Syms RRA, 2001, Silicon based quadrupole mass spectrometry using microelectromechanical systems, JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, Vol: 19, Pages: 557-562, ISSN: 1071-1023
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- Citations: 56
Syms RRA, Blackstone S, 2001, 3-D self assembly of opto-mechanical structures using bonded silicon- on-insulator, Pennington, 5th internation symposium on semiconductor wafer bonding, Honolulu, Hawaii, October 1999, Publisher: Electrochemical Society Inc, Pages: 415-419
Taylor S, Srigengan B, Syms RRA, 2001, Miniature QMS: the problems and possibilities, CAST, Vol: 20, Pages: 7-10
Syms RRA, Gormley C, Blackstone S, 2000, Surface tension powered self-assembly of 3D MOEMS devices using DRIE of bonded silicon-on-insulator wafers, Pages: 1-6, ISSN: 0963-3308
Enhancements obtained by deep reactive ion etching (DRIE) on the micro-opto-electro-mechanical systems (MOEMS) were studied using an inductively coupled plasma (ICP). A new range of self-assembling mechanisms and improved hinge designs were also discussed. The effect of critical fabrication steps on uniformity, yield and accuracy was investigated. It is observed that a substantial increase in the yield and complexity of surface tension self-assembled 3D MOEMS.
Moore DF, Syms RRA, 2000, Tuning of vibrating micromechanical resonators using a focused ION beam, Pages: 11-15, ISSN: 0963-3308
The permanent tuning of the resonant frequency of in-plane vibrating micromechanical resonators is discussed, with particular reference to the tuning of the suspension stiffness rather than tuning of the mass. Iterative frequency tuning of laterally resonant electrostatic comb-drive microactuators by focused ion beam machining is demonstrated.
Taylor S, Srigengan B, Gibson JR, et al., 2000, Miniature mass spectrometer for chemical and biological sensing, Pages: 187-193, ISSN: 0277-786X
An experimental study has been carried out using a Miniature Quadrupole Mass Spectrometer (MicroQuad) for gas analysis. Conventional quadrupole rods have been replaced with a micromachined mass filter made from silicon with Au metallised specially drawn glass fibres of length 30 mm and diameter 0.5 mm. A standard hot filament ion source and both Faraday detection and a channel electron multiplier have been used. The effect of ion focus voltage has also been modelled by SIMION simulation. Conventional electronics were adapted to run at 6 to 8MHz and mass spectra in the range 0-50 a.m.u. The results indicate a good valley separation between O, OH, H2O and Ar2+ and a best resolution at 10% peak height of 0.9 a.m.u at mass 40 with the multiplier. Application of a static magnetic field transversely to the body of the mass filter is shown to improve resolution howbeit at the expense of ion transmission through the filter.
Syms RRA, 2000, Refractive collimating microlens arrays by surface tension self-assembly, IEEE Photonics Technology Letters, Vol: 12, Pages: 1507-1509
Roberts DA, Syms RRA, 2000, 1D and 2D laser line scan generation using a fibre optic resonant scanner, Conference on Micro-Opto-Electro-Mechanical Systems, Publisher: SPIE-INT SOC OPTICAL ENGINEERING, Pages: 62-73, ISSN: 0277-786X
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- Citations: 7
Taylor S, Tate TJ, Syms RRA, et al., 2000, Quadrupole mass spectrometers, US Patent 6,025,591
Tsuchiya S, Green M, Syms RRA, 2000, Structural fabrication using cesium chloride island arrays as resist in a fluorocarbon reactive ion etching plasma, Electrochemical and Solid-State Letters, Vol: 3, Pages: 44-46
Harness T, Syms RRA, 2000, Characteristic modes of electrostatic comb-drive X-Y microactuators, Journal of Micromechanics and Microengineering, Vol: 10, Pages: 7-14
Tsuchiya S, Green M, Syms RRA, 2000, Structural fabrication using cesium chloride island arrays as resist in a fluorocarbon ion etching plasma, Electrochemical and Solid-State Letters, Vol: l5, Pages: 161-170
Spaargaren SMR, Syms RRA, 2000, Characterisation of defects in waveguides formed by electron irradiation of silica-on-silicon, IEEE Lightwave Technology, Vol: 18, Pages: 555-561
Syms RRA, 2000, Self-assembled 3D silicon microscanners with self-assembled electrostatic drives, IEEE Photonics Technology Letters, Vol: 12, Pages: 1519-1521
Tsuchiya S, Green M, Syms RRA, 2000, Structural fabrication using cesium chloride island arrays as resist in a fluorocarbon reactive ion etching plasma, Electrochemical and Solid-State Letters, Vol: 3, Pages: 44-46
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