BibTex format
@article{SYMS:2004:10.1016/j.mee.2004.02.056,
author = {SYMS, R},
doi = {10.1016/j.mee.2004.02.056},
journal = {Microelectronic Engineering},
pages = {295--300},
title = {Sub-micron structuring at mesa edges},
url = {http://dx.doi.org/10.1016/j.mee.2004.02.056},
volume = {73-74},
year = {2004}
}