Imperial College London

ProfessorSpencerSherwin

Faculty of EngineeringDepartment of Aeronautics

Professor of Computational Fluid Mechanics
 
 
 
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Contact

 

+44 (0)20 7594 5052s.sherwin Website

 
 
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Location

 

313BCity and Guilds BuildingSouth Kensington Campus

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Summary

 

Publications

Citation

BibTex format

@article{Sherwin:1993,
author = {Sherwin, SJ and Barouch, E and Karniadakis, GE and Orszag, SA},
journal = {Journal of Vacuum Science and Technology B},
pages = {1310--1313},
title = {Modeling of multilayer ion etching processes},
url = {http://dx.doi.org/10.1116/1.586934},
volume = {11},
year = {1993}
}

RIS format (EndNote, RefMan)

TY  - JOUR
AU - Sherwin,SJ
AU - Barouch,E
AU - Karniadakis,GE
AU - Orszag,SA
EP - 1313
PY - 1993///
SP - 1310
TI - Modeling of multilayer ion etching processes
T2 - Journal of Vacuum Science and Technology B
UR - http://dx.doi.org/10.1116/1.586934
VL - 11
ER -