332 results found
Sherwin SJ, Barouch E, Karniadakis GE, et al., 1993, Modeling of multilayer ion etching processes, Journal of Vacuum Science and Technology B, Vol: 11, Pages: 1310-1313
Sherwin SJ, Orszag SA, Barouch E, et al., 1992, Application of an E.N.O. scheme to simulate the ion etching process, Notes on Num. Fluid Mech
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