BibTex format
@techreport{Durrani:2013,
author = {Durrani, Z and Kaestner, M and Hofer, M and Ivanov, T and Rangelow, IW},
publisher = {SPIE},
title = {Scanning probe lithography for electronics at the 5 nm scale},
url = {https://spie.org/x92224.xml?ArticleID=x92224},
year = {2013}
}