BibTex format
@article{Lenk:2018:10.1016/j.mee.2018.01.022,
author = {Lenk, C and Hofmann, M and Lenk, S and Kaestner, M and Ivanov, T and Krivoshapkina, Y and Nechepurenko, D and Volland, B and Holz, M and Ahmad, A and Reum, A and Wang, C and Jones, M and Zahid, D and Rangelow, I and Durrani, ZAK},
doi = {10.1016/j.mee.2018.01.022},
journal = {Microelectronic Engineering Vol. 192, p77-82 (2018)},
title = {Nanofabrication by field-emission scanning probe lithography and cryogenic plasma etching},
url = {http://dx.doi.org/10.1016/j.mee.2018.01.022},
year = {2018}
}