@article{Law:2003:17/319,
author = {Law, VJ and Thornhill, NF and Kenyon, AJ and Paglirani, A and Lee, K and Watkins, M and Lea, L},
doi = {17/319},
journal = {JOURNAL OF PHYSICS D-APPLIED PHYSICS},
pages = {2146--2151},
title = {Harmonic monitoring of the switched silicon etched process},
url = {http://dx.doi.org/10.1088/0022-3727/36/17/319},
volume = {36},
year = {2003}
}

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TY  - JOUR
AU  - Law,VJ
AU  - Thornhill,NF
AU  - Kenyon,AJ
AU  - Paglirani,A
AU  - Lee,K
AU  - Watkins,M
AU  - Lea,L
DO  - 17/319
EP  - 2151
PY  - 2003///
SN  - 0022-3727
SP  - 2146
TI  - Harmonic monitoring of the switched silicon etched process
T2  - JOURNAL OF PHYSICS D-APPLIED PHYSICS
UR  - http://dx.doi.org/10.1088/0022-3727/36/17/319
UR  - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000185631000023&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
VL  - 36
ER  - 

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