TY - JOUR AU - Sherwin,SJ AU - Barouch,E AU - Karniadakis,GE AU - Orszag,SA EP - 1313 PY - 1993/// SP - 1310 TI - Modeling of multilayer ion etching processes T2 - Journal of Vacuum Science and Technology B UR - http://dx.doi.org/10.1116/1.586934 VL - 11 ER -