@article{McCulloch:1999:10.1002/(SICI)1097-4628(19991031)74:5<1304::AID-APP29>3.0.CO;2-Y,
author = {McCulloch, I and Lu, P and Kang, M},
doi = {10.1002/(SICI)1097-4628(19991031)74:5<1304::AID-APP29>3.0.CO;2-Y},
journal = {JOURNAL OF APPLIED POLYMER SCIENCE},
pages = {1304--1316},
title = {Water-soluble chromophore containing copolymers for bottom antireflection coating applications in lithography},
url = {http://dx.doi.org/10.1002/(SICI)1097-4628(19991031)74:5<1304::AID-APP29>3.0.CO;2-Y},
volume = {74},
year = {1999}
}

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TY  - JOUR
AU  - McCulloch,I
AU  - Lu,P
AU  - Kang,M
DO  - 10.1002/(SICI)1097-4628(19991031)74:5<1304::AID-APP29>3.0.CO;2-Y
EP  - 1316
PY  - 1999///
SN  - 0021-8995
SP  - 1304
TI  - Water-soluble chromophore containing copolymers for bottom antireflection coating applications in lithography
T2  - JOURNAL OF APPLIED POLYMER SCIENCE
UR  - http://dx.doi.org/10.1002/(SICI)1097-4628(19991031)74:5<1304::AID-APP29>3.0.CO;2-Y
UR  - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000082349600029&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
VL  - 74
ER  - 

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