BibTex format
@article{Buschges:2021:10.1002/chem.202101126,
author = {Buschges, MI and Hoffmann, RC and Regoutz, A and Schlueter, C and Schneider, JJ},
doi = {10.1002/chem.202101126},
journal = {CHEMISTRY-A EUROPEAN JOURNAL},
pages = {9791--9800},
title = {Atomic Layer Deposition of Ternary Indium/Tin/Aluminum Oxide Thin Films, Their Characterization and Transistor Performance under Illumination.},
url = {http://dx.doi.org/10.1002/chem.202101126},
volume = {27},
year = {2021}
}