BibTex format
@article{Sun:2018:10.26434/chemrxiv.6128237.v1,
author = {Sun, J and Almquist, B},
doi = {10.26434/chemrxiv.6128237.v1},
title = {Metal-Assisted Plasma Etching of Silicon: A Liquid-Free Alternative to MACE},
url = {http://dx.doi.org/10.26434/chemrxiv.6128237.v1},
year = {2018}
}