BibTex format
@inproceedings{Docherty:2008:10.1016/j.mee.2007.03.001,
author = {Docherty, FT and MacKenzie, M and Craven, AJ and McComb, DW and De, Gendt S and McFadzean, S and McGilvery, CM},
doi = {10.1016/j.mee.2007.03.001},
pages = {61--64},
publisher = {ELSEVIER},
title = {A nanoanalytical investigation of elemental distributions in high-<i>k</i> dielectric gate stacks on silicon},
url = {http://dx.doi.org/10.1016/j.mee.2007.03.001},
year = {2008}
}