BibTex format
@inproceedings{McGilvery:2008:1/012003,
author = {McGilvery, CM and McComb, DW and MacKenzie, M and Craven, AJ and McFadzean, S and De, Gendt S},
doi = {1/012003},
publisher = {IOP PUBLISHING LTD},
title = {Analysis of hafnium containing powders and thin films for CMOS device applications},
url = {http://dx.doi.org/10.1088/1742-6596/126/1/012003},
year = {2008}
}