Imperial College London

Professor David W. McComb

Faculty of EngineeringDepartment of Materials

Adjunct Professor
 
 
 
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Contact

 

+44 (0)20 7594 6750d.mccomb Website

 
 
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Location

 

Royal School of MinesSouth Kensington Campus

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Summary

 

Publications

Citation

BibTex format

@article{Hettiaratchy:2022:10.1116/6.0002207,
author = {Hettiaratchy, EC and Wang, B and Dheenan, A and McGlone, J and Kalarickal, NK and Bagués, N and Ringel, S and McComb, DW and Rajan, S and Myers, RC},
doi = {10.1116/6.0002207},
journal = {Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films},
title = {Quantitative x-ray diffraction analysis of strain and interdiffusion in β-Ga<inf>2</inf>O<inf>3</inf>superlattices of μ -Fe<inf>2</inf>O<inf>3</inf>and β-(Al<inf>x</inf>Ga<inf>1-x</inf>)<inf>2</inf>O<inf>3</inf>},
url = {http://dx.doi.org/10.1116/6.0002207},
volume = {40},
year = {2022}
}

RIS format (EndNote, RefMan)

TY  - JOUR
AB - Superlattices composed of either monoclinic μ-Fe2O3 or β-(AlxGa1-x)2O3 with β-Ga2O3 spacers are grown on (010) β-Ga2O3 substrates using plasma-assisted molecular beam epitaxy. High-resolution x-ray diffraction data are quantitatively fit using commercial dynamical x-ray diffraction software (LEPTOS) to obtain layer thicknesses, strain, and compositions. The strain state of β-(AlxGa1-x)2O3 and μ-Fe2O3 superlattices as characterized using reciprocal space maps in the symmetric (020) and asymmetric (420) diffraction conditions indicates coherent growths that are strained to the (010) β-Ga2O3 lattice. β-(AlxGa1-x)2O3 and μ-Fe2O3 superlattices grown at hotter substrate temperatures result in crystal structures with better coherency and reduced defects compared to colder growths. The growth rate of μ-Fe2O3 is ∼2.6 nm/min at Tsub = 700 °C and drops to ∼1.6 nm/min at Tsub = 800 °C due to increased Fe interdiffusion at hotter substrate temperatures. Scanning transmission electron microscopy data of a μ-Fe2O3 superlattice grown at Tsub = 700 °C confirm that there is significant diffusion of Fe atoms into β-Ga2O3 layers.
AU - Hettiaratchy,EC
AU - Wang,B
AU - Dheenan,A
AU - McGlone,J
AU - Kalarickal,NK
AU - Bagués,N
AU - Ringel,S
AU - McComb,DW
AU - Rajan,S
AU - Myers,RC
DO - 10.1116/6.0002207
PY - 2022///
SN - 0734-2101
TI - Quantitative x-ray diffraction analysis of strain and interdiffusion in β-Ga<inf>2</inf>O<inf>3</inf>superlattices of μ -Fe<inf>2</inf>O<inf>3</inf>and β-(Al<inf>x</inf>Ga<inf>1-x</inf>)<inf>2</inf>O<inf>3</inf>
T2 - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
UR - http://dx.doi.org/10.1116/6.0002207
VL - 40
ER -