BibTex format
@inproceedings{Seng:2005:10.1016/j.nimb.2005.01.098,
author = {Seng, HL and Osipowicz, T and Zhang, J and Tok, ES and Watt, F},
doi = {10.1016/j.nimb.2005.01.098},
pages = {446--451},
publisher = {ELSEVIER SCIENCE BV},
title = {Determination of local lattice tilt in Si<sub>1-x</sub>Ge<sub>x</sub> virtual substrate using high resolution channeling contrast microscopy},
url = {http://dx.doi.org/10.1016/j.nimb.2005.01.098},
year = {2005}
}