BibTex format
@article{Zhang:2006:10.1016/j.susc.2006.03.045,
author = {Zhang, J and Turner, SG and Chiam, SY and Liu, R and Tok, ES and Wee, ATS and Huan, ACH and Kelly, I and Mulcahy, CPA},
doi = {10.1016/j.susc.2006.03.045},
journal = {SURFACE SCIENCE},
pages = {2288--2292},
title = {Sharp n-type doping profiles in Si/SiGe heterostructures produced by atomic hydrogen etching},
url = {http://dx.doi.org/10.1016/j.susc.2006.03.045},
volume = {600},
year = {2006}
}