BibTex format
@article{Bower:2020:10.1021/acsami.0c10570,
author = {Bower, R and Loch, DAL and Ware, E and Berenov, A and Bin, Z and Hovsepian, PE and Ehiasarian, AP and Petrov, PK},
doi = {10.1021/acsami.0c10570},
journal = {ACS APPLIED MATERIALS & INTERFACES},
pages = {45444--45452},
title = {Complementary Metal-Oxide-Semiconductor Compatible Deposition of Nanoscale Transition-Metal Nitride Thin Films for Plasmonic Applications},
url = {http://dx.doi.org/10.1021/acsami.0c10570},
volume = {12},
year = {2020}
}