Imperial College London
Dr Richard Chater

DrRichardChater

Faculty of Engineering, Department of Materials

Instrumentation Research Fellow, Surface Analysis
 
 
 
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Contact

 

+44 (0)20 7594 6740r.chater

 
 
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Location

 

LG62ARoyal School of MinesSouth Kensington Campus

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Summary

 

Publications

Citation

BibTex format

@article{Chater:2016:10.1116/1.4943531,
author = {Chater, RJ and Smith, AJ and Cooke, G},
doi = {10.1116/1.4943531},
journal = {Journal of Vacuum Science & Technology B},
title = {Simultaneous detection of positive and negative secondary ions},
url = {http://dx.doi.org/10.1116/1.4943531},
volume = {34},
year = {2016}
}
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RIS format (EndNote, RefMan)

TY  - JOUR
AB  - A secondary ion mass spectrometer (SIMS) instrument is described that is configured with two SIMSdetectors that are both low-field extraction, quadrupole-based filters. Secondary ions are generated by sputtering with a liquid-metal ion gallium source and column of the type that is common on two-beam electron microscopes. The gallium ion beam, or focused ion beam achieves sub-100 nm focus with a continuous current of up to 300 pA. Positive secondary ions are detected by one SIMSdetector, and simultaneously, negative secondary ions are detected by the second SIMSdetector. The SIMSdetectors are independently controlled for recording mass spectra, concentration depth profiles, and secondary ion images. Examples of simultaneous positive and negative SIMS are included that demonstrate the advantage of this facility for surface analysis and depth profiling. The SIMS secondary ion collection has been modeled using the ray tracing program simion (“simion”, Scientific Instrument Services, Inc., Ringoes, NJ, 08551-1054, see http://www.simion.com) in order to understand the interaction of the secondary ions of opposite polarities in the extraction volume for the purpose of optimizing secondary ion collection.
AU  - Chater,RJ
AU  - Smith,AJ
AU  - Cooke,G
DO  - 10.1116/1.4943531
PY  - 2016///
SN  - 1071-1023
TI  - Simultaneous detection of positive and negative secondary ions
T2  - Journal of Vacuum Science & Technology B
UR  - http://dx.doi.org/10.1116/1.4943531
UR  - http://hdl.handle.net/10044/1/42038
VL  - 34
ER  -
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