BibTex format
@article{Hoye:2015:10.1063/1.4916525,
author = {Hoye, RLZ and Muñoz-Rojas, D and Nelson, SF and Illiberi, A and Poodt, P and Roozeboom, F and MacManus-Driscoll, JL},
doi = {10.1063/1.4916525},
journal = {APL Materials},
pages = {040701--040701},
title = {Research Update: Atmospheric pressure spatial atomic layer deposition of ZnO thin films: Reactors, doping, and devices},
url = {http://dx.doi.org/10.1063/1.4916525},
volume = {3},
year = {2015}
}