Publications
372 results found
Syms RRA, 2005, Optical MEMS on bonded silicon, Design, automation and test in Europe, 2005 ICM, MESSE, Munich, Germany, 7 - 11 March 2005
Syms RRA, Lohmann A, Huang W, 2005, MOEMS laser tuning element with an indirect drive, 10th IEEE/LEOS International Conference on Optical MEMs and Their Applications, Publisher: IEEE, Pages: 11-12
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- Citations: 1
Syms RRA, Zou H, Stagg J, et al., 2004, Sliding-blade MEMS iris and variable optical attenuator, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Vol: 14, Pages: 1700-1710, ISSN: 0960-1317
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- Citations: 72
Syms RRA, Zou H, Yao J, et al., 2004, Scalable electrothermal MEMS actuator for optical fibre alignment, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Vol: 14, Pages: 1633-1639, ISSN: 0960-1317
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- Citations: 45
Geear MC, Yeatman EM, Holmes AS, et al., 2004, Microengineered electrically resettable circuit breaker, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Vol: 13, Pages: 887-894, ISSN: 1057-7157
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- Citations: 12
Portch D, Syms RRA, Huang W, 2004, Folded-spiral EDWAs with continuously varying curvature, IEEE PHOTONICS TECHNOLOGY LETTERS, Vol: 16, Pages: 1634-1636, ISSN: 1041-1135
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- Citations: 8
Syms RRA, Zou H, Stagg J, et al., 2004, MEMS variable optical attenuator with a compound latch, 29th International Conference on Micro and Nano Engineering (MNE 2003), Publisher: ELSEVIER, Pages: 423-428, ISSN: 0167-9317
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- Citations: 5
SYMS R, 2004, MEMS variable optical attenuator with a compound latch, Microelectronic Engineering, Vol: 73-74, Pages: 423-428, ISSN: 0167-9317
SYMS R, 2004, Sub-micron structuring at mesa edges, Microelectronic Engineering, Vol: 73-74, Pages: 295-300, ISSN: 0167-9317
Syms RRA, Zou H, Stagg J, 2004, Robust latching MEMS translation stages for micro-optical systems, JOURNAL OF MICROMECHANICS AND MICROENGINEERING, Vol: 14, Pages: 667-674, ISSN: 0960-1317
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- Citations: 13
Larsson MP, Syms RRA, 2004, Self-aligning MEMS in-line separable connector, IEEE/ASME J.Microelectromech. Syst., Vol: 13, Pages: 365-376
Huang W, Syms RRA, Stagg J, et al., 2004, Precision MEMS flexure mount for a Littman tunable external cavity laser, IEE PROCEEDINGS-SCIENCE MEASUREMENT AND TECHNOLOGY, Vol: 151, Pages: 67-75, ISSN: 1350-2344
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- Citations: 18
Syms RRA, Zou H, Stagg J, et al., 2004, Multistate latching MEMS variable optical attenuator, IEEE PHOTONICS TECHNOLOGY LETTERS, Vol: 16, Pages: 191-193, ISSN: 1041-1135
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- Citations: 23
Syms RRA, Zou H, Stagg J, 2004, MEMS iris mechanism, IEEE/LEOS optical MEMS 2004, Kagawa, Japan, 22 - 26 August 2004
Syms RRA, Ahmad MM, Young IR, et al., 2004, MEMS Helmoltz coils for magnetic resonance spectroscopy, 15th micromechanics workshop, MME '04, Leuven, Belgium, 5 - 7 September 2004, Pages: 287-290
Boyle P, Moore DF, Syms RRA, et al., 2004, MEMS bistable clamp with electrical locking and release, 15th micromechanics workshop, MME '04, Leuven, Belgium, 5 - 7 September 2004
Hong YK, Syms RR, Pister KSJ, et al., 2004, Corner cube reflectors by surface tension self-assembly, IEEE/LEOS optical MEMS 2004, Kagawa, Japan, 22 - 26 August 2004, Pages: 170-171
Syms RRA, Zou H, Stagg J, et al., 2004, Optical fibre aligner using deep-etched silicon electrothermal actuator, IEEE/LEOS optical MEMS 2004, Kagawa, Japan, 22 - 26 August 2004
Yeatman EM, Geear M, Holmes AS, et al., 2004, Performance and analysis of thermally tripped MEMS circuit breakers, MicroMechanics Europe 2004, Leuven, Belgium, 5 - 7 September 2004, Pages: 295-298
Syms RRA, Zou H, Stagg J, 2004, MEMS angular positioning stage with a Vernier latch, 15th micromechanics workshop, MME '04, Leuven, Belgium, 5 - 7 September 2004
Syms RRA, Lohmann A, 2003, MOEMS tuning element for a Littrow external cavity laser, IEEE/LEOS International Conference on Optical MEMS, Publisher: IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, Pages: 921-928, ISSN: 1057-7157
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- Citations: 35
Syms RRA, Michelutti L, Ahmad MM, 2003, Two-dimensional microfabricated electrostatic einzel lens, SENSORS AND ACTUATORS A-PHYSICAL, Vol: 107, Pages: 287-297, ISSN: 0924-4247
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- Citations: 14
Syms RRA, Yeatman EM, Bright VM, et al., 2003, Surface tension-powered self-assembly of micro structures - The state-of-the-art, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, Vol: 12, Pages: 387-417, ISSN: 1057-7157
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- Citations: 258
Huang W, Syms RRA, 2003, Sol-gel silica-on-silicon buried-channel EDWAs, JOURNAL OF LIGHTWAVE TECHNOLOGY, Vol: 21, Pages: 1339-1349, ISSN: 0733-8724
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- Citations: 25
Lohmann A, Syms RRA, 2003, External cavity laser with a vertically etched silicon blazed grating, IEEE PHOTONICS TECHNOLOGY LETTERS, Vol: 15, Pages: 120-122, ISSN: 1041-1135
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- Citations: 27
Syms RRA, 2003, Surface tension self-assembly of microstructures, Cambridge/MIT conference "Future of MEMS: new materials, new devices", Cambridge, 20 - 21 May 2003
Shamonina E, Syms RRA, Solymar L, 2003, A theoretical investigation of the reflection, refraction and diffraction of 2-D magneto-inductive (MI) waves, Progress in electromagnetics research symposium, PIERS 2003, Honolulu, Hawaii, USA, 13 -16 October 2003
Syms RRA, 2003, Sub-micron structuring at mesa edges, Micro- and nano-engineering (MNE) 2003, Cambridge, 22 - 25 September 2003
Moore DF, Williams JA, Hopcroft MA, et al., 2002, Laser micromachining of thin films for optoelectronic devices and packages, Pages: 140-147, ISSN: 0277-786X
Focused laser micromachining in an optical microscope system is used to prototype packages for optoelectronic devices and to investigate new materials with potential applications in packaging. Micromachined thin films are proposed as mechanical components to locate fibres and other optical and electrical components on opto-assemblies. This paper reports prototype structures which are micromachined in silicon carbide to produce beams 5 μm thick by (i) laser cutting a track in a SiC coated Si wafer, (ii) undercutting by anisotropic silicon etching using KOH in water, and (iii) trimming if necessary with the laser system. This approach has the advantage of fast turn around and proof of concept. Mechanical test data are obtained from the prototype SiC beam package structures by testing with a stylus profilometer. The Youngs modulus obtained for chemical vapour deposited silicon carbide is 360 +/- 50 GPa indicating that it is a promising material for packaging applications.
Huang W, Syms RRA, Yeatman EM, et al., 2002, Fiber-device-fiber gain from a sol-gel erbium-doped waveguide amplifier, IEEE PHOTONICS TECHNOLOGY LETTERS, Vol: 14, Pages: 959-961, ISSN: 1041-1135
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- Citations: 63
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