Imperial College London
Professor Richard Syms

ProfessorRichardSyms

Faculty of Engineering, Department of Electrical and Electronic Engineering

Professor
 
 
 
//

Contact

 

+44 (0)20 7594 6203r.syms

 
 
//

Location

 

702Electrical EngineeringSouth Kensington Campus

//

Summary

 

Publications

Citation

BibTex format

@article{Syms:2021:10.3390/mi12101191,
author = {Syms, R and Bouchaala, A},
doi = {10.3390/mi12101191},
journal = {Micromachines},
pages = {1--12},
title = {Mechanical synchronization of MEMS electrostatically driven coupled beam filters},
url = {http://dx.doi.org/10.3390/mi12101191},
volume = {12},
year = {2021}
}
Download

RIS format (EndNote, RefMan)

TY  - JOUR
AB  - Micro-electromechanical systems (MEMS) bandpass filters based on arrays of electrostatically driven coupled beams have been demonstrated at MHz frequencies. High performance follows from the high Q-factor of mechanical resonators, and electrostatic transduction allows tuning, matching and actuation. For high-order filters, there is a conflict between the transduction mechanism and the coupling arrangement needed for dynamic synchronization: it is not possible to achieve synchronization and tuning simultaneously using a single voltage. Here we propose a general solution, based on the addition of mass-loaded beams at the ends of the array. These beams deflect for direct current (DC) voltages, and therefore allow electrostatic tuning, but do not respond to in-band alternating current (AC) voltages and hence do not interfere with synchronization. Spurious modes generated by these beams may be damped, leaving a good approximation to the desired response. The approach is introduced using a lumped element model and verified using stiffness matrix and finite element models for in-plane arrays with parallel plate drives and shown to be tolerant of the exact mass value. The principle may allow compensation of fabrication-induced variations in complex filters.
AU  - Syms,R
AU  - Bouchaala,A
DO  - 10.3390/mi12101191
EP  - 12
PY  - 2021///
SN  - 2072-666X
SP  - 1
TI  - Mechanical synchronization of MEMS electrostatically driven coupled beam filters
T2  - Micromachines
UR  - http://dx.doi.org/10.3390/mi12101191
UR  - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000713298700001&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
UR  - https://www.mdpi.com/2072-666X/12/10/1191
UR  - http://hdl.handle.net/10044/1/101748
VL  - 12
ER  -
Download