Imperial College London
Professor Richard Syms

ProfessorRichardSyms

Faculty of Engineering, Department of Electrical and Electronic Engineering

Professor
 
 
 
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Contact

 

+44 (0)20 7594 6203r.syms

 
 
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Location

 

702Electrical EngineeringSouth Kensington Campus

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Summary

 

Publications

Citation

BibTex format

@article{Syms:2016:2/023001,
author = {Syms, R and Wright, S},
doi = {2/023001},
journal = {Journal of Micromechanics and Microengineering},
title = {MEMS Mass Spectrometers: the Next Wave of Miniaturization},
url = {http://dx.doi.org/10.1088/0960-1317/26/2/023001},
volume = {26},
year = {2016}
}
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RIS format (EndNote, RefMan)

TY  - JOUR
AB  - This paper reviews mass spectrometers based on micro-electro-mechanical systems (MEMS) technology. The MEMS approach to integration is first briefly described, and the difficulties of miniaturizing mass spectrometers are outlined. MEMS components for ionization and mass filtering are then reviewed, together with additional components for ion detection, vacuum pressure measurement and pumping. Mass spectrometer systems containing MEMS sub-components are then described, applications for miniaturized and portable systems are discussed, and challenges and opportunities are presented.
AU  - Syms,R
AU  - Wright,S
DO  - 2/023001
PY  - 2016///
SN  - 1361-6439
TI  - MEMS Mass Spectrometers: the Next Wave of Miniaturization
T2  - Journal of Micromechanics and Microengineering
UR  - http://dx.doi.org/10.1088/0960-1317/26/2/023001
UR  - http://hdl.handle.net/10044/1/27025
VL  - 26
ER  -
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