BibTex format
@article{Fobelets:2014:10.1016/j.mee.2014.07.015,
author = {Fobelets, K and Utke, I},
doi = {10.1016/j.mee.2014.07.015},
journal = {MICROELECTRONIC ENGINEERING},
pages = {VII--VII},
title = {Nano Fabrication 2013 Preface},
url = {http://dx.doi.org/10.1016/j.mee.2014.07.015},
volume = {121},
year = {2014}
}