BibTex format
@article{Wright:2010:10.1116/1.3466531,
author = {Wright, SW and Judge, CP and Lee, MJ and Bowers, DF and Dunbar, M and Wilson, CD},
doi = {10.1116/1.3466531},
journal = {JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B},
pages = {834--840},
title = {High sheet resistance, low temperature coefficient of resistance resistor films for integrated circuits},
url = {http://dx.doi.org/10.1116/1.3466531},
volume = {28},
year = {2010}
}