Imperial College London
Portrait Picture

Professor Tom Pike

Faculty of Engineering, Department of Electrical and Electronic Engineering

Professor of Microengineering
 
 
 
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Contact

 

+44 (0)20 7594 6207w.t.pike

 
 
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Location

 

604Electrical EngineeringSouth Kensington Campus

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Summary

 

Publications

Citation

BibTex format

@article{Delahunty:2014:10.1016/j.sna.2013.11.008,
author = {Delahunty, AK and Pike, WT},
doi = {10.1016/j.sna.2013.11.008},
journal = {Sensors and Actuators A: Physical},
pages = {36--43},
title = {Metal-armouring for shock protection of MEMS},
url = {http://dx.doi.org/10.1016/j.sna.2013.11.008},
volume = {215},
year = {2014}
}
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RIS format (EndNote, RefMan)

TY  - JOUR
AB  - This paper demonstrates a novel concept for the shock protection of MEMS suspensions: solder is incorporated within the sidewalls of the suspension to produce protective metal armouring. This provides solder–solder contact at the extremes of the suspension travel, greatly increasing the shock resistance. Model suspension systems were fabricated using deep reactive ion etching (DRIE) and shock tested in a drop-test rig at acceleration levels up to 6000 × g. The solder armour proved to absorb ∼90% of the collision kinetic energy and double the shock resistance of the MEMS suspension.
AU  - Delahunty,AK
AU  - Pike,WT
DO  - 10.1016/j.sna.2013.11.008
EP  - 43
PY  - 2014///
SN  - 0924-4247
SP  - 36
TI  - Metal-armouring for shock protection of MEMS
T2  - Sensors and Actuators A: Physical
UR  - http://dx.doi.org/10.1016/j.sna.2013.11.008
UR  - http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000339129800006&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=1ba7043ffcc86c417c072aa74d649202
UR  - https://www.sciencedirect.com/science/article/abs/pii/S0924424713005530?via%3Dihub
VL  - 215
ER  -
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