BibTex format
@inproceedings{Holz:2017,
author = {Holz, M and Guliyev, E and Kaestner, M and Ivanov, T and Ahmed, A and Reum, A and Lenk, S and Lenk, C and Hoffman, M and Reuter, C and Durrani, Z and Jones, M and Rangelow, I},
title = {6” Wafer scale field-emission scanning probe lithography (FE-SPL) and fast AFM tool employing active cantilever for mix&match single-digit nanolithography},
year = {2017}
}