Citation

BibTex format

@article{Pagliarani:2006:10.1049/el:20064133,
author = {Pagliarani, A and Kenyon, AJ and Thornhill, NF and Sirisena, E and Lee, K and Law, VJ},
doi = {10.1049/el:20064133},
journal = {ELECTRONICS LETTERS},
pages = {120--121},
title = {Process harmonic pulling in RIE plasma-tool},
url = {http://dx.doi.org/10.1049/el:20064133},
volume = {42},
year = {2006}
}

RIS format (EndNote, RefMan)

TY  - JOUR
AU - Pagliarani,A
AU - Kenyon,AJ
AU - Thornhill,NF
AU - Sirisena,E
AU - Lee,K
AU - Law,VJ
DO - 10.1049/el:20064133
EP - 121
PY - 2006///
SN - 0013-5194
SP - 120
TI - Process harmonic pulling in RIE plasma-tool
T2 - ELECTRONICS LETTERS
UR - http://dx.doi.org/10.1049/el:20064133
UR - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000235390500037&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
VL - 42
ER -