@article{Law:2000:10.1016/S0042-207X(00)00229-3,
author = {Law, VJ and Kenyon, AJ and Thornhill, NF and Srigengan, V and Batty, I},
doi = {10.1016/S0042-207X(00)00229-3},
journal = {VACUUM},
pages = {351--364},
title = {Remote-coupled sensing of plasma harmonics and process end-point detection},
url = {http://dx.doi.org/10.1016/S0042-207X(00)00229-3},
volume = {57},
year = {2000}
}

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TY  - JOUR
AU  - Law,VJ
AU  - Kenyon,AJ
AU  - Thornhill,NF
AU  - Srigengan,V
AU  - Batty,I
DO  - 10.1016/S0042-207X(00)00229-3
EP  - 364
PY  - 2000///
SN  - 0042-207X
SP  - 351
TI  - Remote-coupled sensing of plasma harmonics and process end-point detection
T2  - VACUUM
UR  - http://dx.doi.org/10.1016/S0042-207X(00)00229-3
UR  - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000088162800003&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
VL  - 57
ER  - 

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