This SEM features a Schottky field emission gun with Gemini electron column operating between 100 V and 30 kV. This gives spatial resolutions of 1.0 nm. The SEM column is coupled with a Ga+ ion FIB. The FIB column operates between 1 kV and 30 kV with a range of ion beam currents between 1 pA and 20 nA. It also has an imaging resolution of 2.5 nm.

High-resolution images are obtained with a standard in-chamber ET detector, and two in-column detectors - a secondary electron detector and an energy selective backscattered electron detector.

A Zeiss gas injection system is fitted, which enables the deposition of platinum to protect the sample surface during ion milling.

Chemical analysis can be carried out on the Oxford Instruments INCA.

Zeiss Auriga Cross Beam
Zeiss Auriga Cross Beam