Cleanroom suite

The Centre for Bio-Inspired Technology hosts a Cleanroom Suite for CMOS post-processing, packaging and microfluidics.

Location: Bessemer Building, B516-520

Facility Contacts:

• Florent Seichepine ( f.seichepine@imperial.ac.uk )
• Timothy Constandinou ( t.constandinou@imperial.ac.uk )
• Lewis Keeble (l.keeble18@imperial.ac.uk)

Overview

Cleanroom: CBiT has a suite of two ISO class 6 cleanrooms (equivalent to US standards class 1000). These have been designed to support CE Marking/FDA approvals, the development of biosensor devices, electrode and microfluidic fabrication, packaging/post-processing of CMOS chips and research in any other areas that requires a clean, low particle-count environment.

The largest ‘yellow’ room, with yellow filtered light for photosensitive processes, houses most of the fabrication tools/processes and all relevant inspection and measurement facilities. This includes photolithography tools, a direct laser writing system, two-photon photolithography, two PVD systems for thin film deposition of metals, oxides and organics, surface characterisation tools, an oxygen plasma chamber, an electroplating setup, as well as wet and dry benches for chemical processing. The smaller ‘white’ room houses various equipment allowing for wet silicon oxidation, wire bonding, and parylene deposition.

You can find more information about our facility, our equipment and processes, and health and safety documents at our wiki page.

Access

To gain access to the cleanroom facilities, you must arrange a health and safety induction with one of the cleanroom managers. After this, you will have card access granted to the cleanroom, but you will need a PPMS account to first book training on specific pieces of equipment and then book equipment. Your PPMS account will need to be linked to a financial account to allow for invoicing of access charges, so please discuss this with your supervisor.

Equipment

• Suss Microtec MA6 mask aligner with NIL attachment
• Kloe Dilase 250 direct laser writing system
• Nanoscribe 3D laser nanolithography
• CEE Apogee spin coater
• BOC Edwards Auto 500 sputtering/ e-beam evaporation system
• Korvus Hex sputtering/ thermal and e-beam evaporation/ organics deposition system
• Veeco Dektak 6M stylus profiler
• Diener oxygen plasma chamber
• 5-100x optical microscope
• Ovens, hotplates, rocking platforms
• SCS Labcoater - Parylene CVD deposition system
• Wet oxidation furnace
• Versastat 3-400 electrochemical workstation
• K&S 4123 wire bonder