Imperial College London
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ProfessorAndrewHolmes

Faculty of Engineering, Department of Electrical and Electronic Engineering

Professor of Microelectromechanical Systems
 
 
 
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Contact

 

+44 (0)20 7594 6239a.holmes Website

 
 
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Assistant

 

Ms Susan Brace +44 (0)20 7594 6215

 
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Location

 

701Electrical EngineeringSouth Kensington Campus

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Summary

 

Publications

Citation

BibTex format

@inproceedings{Mukherjee:2009,
author = {Mukherjee, AG and Vatti, S and Kiziroglou, ME and Moseley, RW and Papavassiliou, C and Holmes, AS and Yeatman, EM},
pages = {1876--1879},
title = {Integration of self-assembled inductors with CMOS LC oscillators},
year = {2009}
}
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RIS format (EndNote, RefMan)

TY  - CPAPER
AB  - The quality factor (Q) of integrated inductors is of great importance to radio frequency applications. Monolithic integration of out-of-plane Au inductors with Complementary Metal-Oxide-Semiconductor (CMOS) LC oscillators is reported in this paper. The recently developed self-assembly process involves in-plane fabrication of Au inductors and subsequent rotation of the structure by surface tension forces of a melting Sn hinge. The CMOS compatibility of this process is demonstrated through the integration of an LC oscillator with the self-assembled inductor using post-CMOS processing. At a 1.48 GHz oscillation frequency, a phase noise of -95 dBc/Hz is reported at a 100 kHz frequency offset. Obtained results show this technique to be promising for the integration of high Q inductors with commercial RF systems.
AU  - Mukherjee,AG
AU  - Vatti,S
AU  - Kiziroglou,ME
AU  - Moseley,RW
AU  - Papavassiliou,C
AU  - Holmes,AS
AU  - Yeatman,EM
EP  - 1879
PY  - 2009///
SP  - 1876
TI  - Integration of self-assembled inductors with CMOS LC oscillators
ER  -
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