BibTex format
@article{HEMMENT:1987:10.1016/0168-583X(87)90811-1,
author = {HEMMENT, PLF and REESON, KJ and KILNER, JA and CHATER, RJ and MARSH, C and BOOKER, GR and DAVIS, JR and CELLER, GK},
doi = {10.1016/0168-583X(87)90811-1},
journal = {NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS},
pages = {129--133},
title = {NOVEL DIELECTRIC SILICON PLANAR STRUCTURES FORMED BY ION-BEAM SYNTHESIS},
url = {http://dx.doi.org/10.1016/0168-583X(87)90811-1},
volume = {21},
year = {1987}
}