BibTex format
@article{HEMMENT:1985:10.1016/0168-583X(85)90648-2,
author = {HEMMENT, PLF and PEART, RF and YAO, MF and STEPHENS, KG and ARROWSMITH, RP and CHATER, RJ and KILNER, JA},
doi = {10.1016/0168-583X(85)90648-2},
journal = {NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS},
pages = {292--297},
title = {SILICON ON INSULATOR STRUCTURES FORMED BY THE IMPLANTATION OF HIGH-DOSES OF REACTIVE IONS},
url = {http://dx.doi.org/10.1016/0168-583X(85)90648-2},
volume = {6},
year = {1985}
}