BibTex format
@article{Petrov:1997:10.1016/S0042-207X(97)00079-1,
author = {Petrov, PK and Volpyas, VA and Hollmann, EK and Tanaka, T and Kawabata, K},
doi = {10.1016/S0042-207X(97)00079-1},
journal = {VACUUM},
pages = {669--670},
title = {Monte Carlo simulation of argon atoms transport during deposition of W thin films by RF-dc coupled magnetron sputtering},
url = {http://dx.doi.org/10.1016/S0042-207X(97)00079-1},
volume = {48},
year = {1997}
}