BibTex format
@article{SYMS:2004:10.1016/j.mee.2004.03.013,
author = {SYMS, R},
doi = {10.1016/j.mee.2004.03.013},
journal = {Microelectronic Engineering},
pages = {423--428},
title = {MEMS variable optical attenuator with a compound latch},
url = {http://dx.doi.org/10.1016/j.mee.2004.03.013},
volume = {73-74},
year = {2004}
}