Micro- and Nano-fabrication in the James Watt Nanofabrication Centre at Glasgow
Prof Douglas J. Paul
Director of the James Watt Nanofabrication Centre, University of Glasgow
The James Watt Nanofabrication Centre at the University at Glasgow houses £22M of nanofabrication tools in a 750 square metre cleanroom run by 19 technicians and is part of the EPSRC III-V National Facility and the STFC Kelvin-Rutherford Facility. The Centre presently fabricates components, devices and systems for 90 universities and 250 companies from 28 countries around the world. This presentation will demonstrate some of the capability at Glasgow including the electron beam lithography with linewidths down to 2.5 nm, the low damage dry etch making sub-2 nm nanowires and ability to process samples from square cms to full wafers. Examples of complete delivered technologies will be presented including 10 nm Si nanowire transistors, III-V CMOS, THz repetition-rate mode locked lasers, integrated telecoms chips, Si photonic circuits, mid-infrared InSb LEDs and photodetectors, atom traps and thermoelectric devices. Finally methods to access the centre through EPSRC and STFC national facilities will be discussed.
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