A device for generating short wavelength radiation

A compact, high-performance laser system designed to generate tunable deep-UV radiation through a streamlined conversion process.

Proposed Uses

The invention delivers a high-efficiency, high-power deep-UV source suitable for a wide range of industrial and scientific applications.

• In semiconductor manufacturing, the system delivers industry-standard wavelengths (193 nm and 248 nm) with higher efficiency and higher power for applications such as lithography and wafer inspection, boosting throughput and reducing system complexity.
• In quantum technologies, it provides precise deep-UV beams for atom/ion cooling and trapping.
• In life sciences and healthcare, the system enables advanced bio-sensing and sterilisation, including protein/DNA/RNA detection and virus inactivation.

Beyond these sectors, the technology offers a flexible platform for spectroscopy, metrology, and other areas needing powerful, tunable deep-UV light.

Problem addressed

Conventional deep-UV sources rely on multiple non-linear conversion stages from long-wavelength lasers, , resulting in low efficiency, limited tunability, high cost, and bulky systems. These limitations restrict their adoption and performance in applications that demand precise UV control. The invention overcomes this by streamlining the conversion process, in turn boosting efficiency and output power, and providing continuous wavelength tuning in a compact, more economical design.

Technology Overview

The technology generates deep-ultraviolet (DUV) radiation by starting with a near-visible wavelength laser that internally converts part of its output to ultraviolet through second-harmonic generation. This UV output is then converted to deep-UV in a single external non-linear optical step using a resonant enhancement cavity. The resonant cavity significantly boosts conversion efficiency, making the process viable for continuous-wave operation at low power and effective for pulsed lasers with higher peak power. By tuning the fundamental near-visible wavelength, the DUV output can be continuously adjusted, offering a compact, efficient, and tunable solution.

Intellectual property information

UK Priority Application - GB2504523.8 – Tunable short-wavelength radiation

Benefits

• Higher efficiency and power compared to multi-step conversion systems.
• Compact and less complex design, reducing size and cost.
• Continuous wavelength tunability, with ability to efficiently produce industry-standard wavelengths (193 nm, 248 nm).
• Scalable for multiple markets, including semiconductors, quantum technologies, and life sciences.