Citation

BibTex format

@article{Law:2003:17/319,
author = {Law, VJ and Thornhill, NF and Kenyon, AJ and Paglirani, A and Lee, K and Watkins, M and Lea, L},
doi = {17/319},
journal = {JOURNAL OF PHYSICS D-APPLIED PHYSICS},
pages = {2146--2151},
title = {Harmonic monitoring of the switched silicon etched process},
url = {http://dx.doi.org/10.1088/0022-3727/36/17/319},
volume = {36},
year = {2003}
}

RIS format (EndNote, RefMan)

TY  - JOUR
AU - Law,VJ
AU - Thornhill,NF
AU - Kenyon,AJ
AU - Paglirani,A
AU - Lee,K
AU - Watkins,M
AU - Lea,L
DO - 17/319
EP - 2151
PY - 2003///
SN - 0022-3727
SP - 2146
TI - Harmonic monitoring of the switched silicon etched process
T2 - JOURNAL OF PHYSICS D-APPLIED PHYSICS
UR - http://dx.doi.org/10.1088/0022-3727/36/17/319
UR - https://www.webofscience.com/api/gateway?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000185631000023&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=a2bf6146997ec60c407a63945d4e92bb
VL - 36
ER -

Contact us

Nina Thornhill, ABB/RAEng Professor of Process Automation
Centre for Process Systems Engineering
Department of Chemical Engineering
Imperial College London
South Kensington Campus, London SW7 2AZ

Tel: +44 (0)20 7594 6622
Email: n.thornhill@imperial.ac.uk